RF-MEMS based Tuner for microwave and millimeterwave applications

This chapter sets out the basics and applications of impedance tuner for microwave and millimeterwave applications. Engineering examples, based on innovative and up-to-date Radio-Frequency MicroElectroMechanical Systems (RF-MEMS) technologies, are used to illustrate theoretical and practical principles. An explicit, comprehensive and efficient design methodology of impedance tuners is furthermore detailed. This generic design procedure is illustrated by the design of a tuner building block and followed by the description of appropriate measurements. Finally the capabilities of RF-MEMS based Impedance tuner issued from the state of the art are briefly reviewed and are followed by global conclusions. The purposes of this chapter are then to give to the readers comprehensive informations on: • The basics and applications of microwave and millimeterwave impedance tuners, • The architectures of tuners, • The implementation of tuner thanks to RF-MEMS technology, • The design and characterization methodologies.